NU2251 High Resolution Maskless Lithography

Tender description

The scope of this tender covers the supply, delivery, installation and ongoing maintenance of a high resolution maskless aligner for UV (375 nm) photolithography within the new Great Northeast Nanofab (GNN) facility. The GNN is a new micro/nanofabrication clean room, hosted at Newcastle University. The intention is for the GNN to act as a regional open-access clean room for academia and low TRL commercial developments, allowing other universities and sites to specialise in a hub-and-spoke model. High-resolution photolithography has been identified as a critical capability gap at the GNN. This procurement is externally funded by the Engineering and Physical Sciences Research Council (EPSRC). Keywords: high-resolution maskless lithography, SLM, Laboratory Equipment, Lithography, Research