Awarded contract
Published
Dry-etching equipment
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Value
157,504 EUR
Current supplier
Oxford Instruments Nanotechnology Tools Ltd
Description
Upgrade des automates des deux bâtis Oxford de l'IEMN. Fourniture et installation par le fournisseur d’Upgrade (X20 PLC) des automates des trois bâtis Oxford utilisés en Centrale de Micro, Nanofabrication (CMNF): bâti 80 RIE no série 814840, bâti 80 RIE no série 814841 et Plasmalab 100 ICP no série 616170.
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