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Awarded contract

Published

Dry-etching equipment

12 Suppliers have already viewed this notice

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Value

157,504 EUR

Current supplier

Oxford Instruments Nanotechnology Tools Ltd

Description

Upgrade des automates des deux bâtis Oxford de l'IEMN. Fourniture et installation par le fournisseur d’Upgrade (X20 PLC) des automates des trois bâtis Oxford utilisés en Centrale de Micro, Nanofabrication (CMNF): bâti 80 RIE no série 814840, bâti 80 RIE no série 814841 et Plasmalab 100 ICP no série 616170.

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