Provision of a 200mm Spectroscopic Ellipsometer
Published
Description
The SNC (Southampton nanofabrication Centre) wants to purchase a Spectroscopic Ellipsometer capable of handling 200mm wafers. Spectroscopic Ellipsometery is an essential characterisation technique for the facility and is used daily to rapidly qualify the majority of all lithographic, deposition and etch processing. Throughput, measurement speed, and sample flexibility are important factors to this procurement.
Timeline
Award date
8 months ago
Publish date
8 months ago
Buyer information
University of Southampton
- Contact:
- Morgan Hughes
- Email:
- procurement@soton.ac.uk
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