Special-purpose electrical goods

Description

The purchase relates to a refurbished four year old demo model of an electronlithography tool. The main unit is an eLINE Plus tool from Raith equipped with a 30 kV Gemini column from Zeiss, an interferometer controlled precision stage and beamsteering control system and software from Raith. The eLINE tool extinguishes itself beyond the column and stage especially by its flexibility due to a voluminous chamber with numerous flanges for attaching other components. This large flexibility is required to have room for cryo installations, sample transfer unit(s), Gas Injection System (GIS) as well as analytical tools. DTU is conducting further research into ice for nanolithography purposes as well as to develop the tooling technology. Raith is selling a demo model of an electron lithography tool at a significant discount. It is crucial for further research at DTU within the field of ice lithography to acquire such an advanced research tool. Raith is the world leading supplier of electronlithography tools based on scanning electron microscope columns. To our knowledge, there are no other suppliers in the world who are able to match the technical capabilities of Raith in this tool technology. Other suppliers can supply electron beam lithography tools however; these are designed as dedicated electron beam lithography tools without the possibility of adding equipment to the chamber. In order to study the ice interactions in a number of materials there is a need for: — room for cryostage, — loadlock for cryogenic transfer, — possibility to add backscatter detector, — possibility to add Transmission Kikuchi Diffraction (TKD) detector or Electron Backscatter Diffraction (EBSD) detector, — possibility to add Energy-Dispersive X-ray Spectroscopy (EDS/EDX) system, — room for access port for TEM grid holder. The tool from Raith can provide these functionalities.