Procurement of Helios Hydra PFIB Gen V

Description

DTU Nanolab will procure a Small Dual Beam (SDB) for sample analysis and preparation of samples in the range 5nm thickness to >1mm3. The tool will be able to carry out fully automated Electron and Ion Beam alignments, TEM Lamella preparation including pick and place onto TEM grids, Automated 3D Slice and View, Capable of scripting using Python and able to be controlled for Ma-chine Learning. Electron optics must achieve 0.6nm nominal resolution 2-15keV with a monochromated energy spread >200meV. Liquid metal (Ga) Ion source is not acceptable for this application. The FIB should be multi species focused gas plasma. In-column Energy filtering detectors are necessary for the successful imaging of the wide array of sample types analyzed/prepared at DTU Nanolab Remote operation is essential for everyday users and Service. The SDB will be used by students, researchers and external customers and therefore should be a proven and robust design that enables training to a wide and varied user base.