Industrial process control equipment

Description

The Space Research Centre at the University of Leicester wishes to procure one photolithography suite for nanofabrication processes including the manufacture of graphene field effect transistors, with feature sizes of ~1μm, with excellent repeatability. This procurement process is an OJEU open procedure, which is advertised on the University’s electronic tendering portal (Delta eSourcing), contracts finder and EU Publications Office as required within the Public Contract Regulations 2015. The contract is partly funded by a European Regional Development Fund (ERDF) grant award. As part of its Space Technology Applications from Research (STAR) Accelerator project, the Space Research Centre at the University of Leicester is developing a thin film manufacturing facility for in-house nanofabrication, R&D and prototyping of instruments for a wide range of technologies, including space and medical applications. We are seeking to procure one photolithography suite for nanofabrication processes including the manufacture of graphene field effect transistors, with feature sizes of ~1μm, with excellent repeatability. The machine must meet a minimum technical requirement detailed in the invitation to tender (ITT) document against which the tender will be scored using pass/fail criteria and points awarded for exceeding certain criteria. The tenderer shall demonstrate this by written specification and/or drawings where the demonstration method is not specified in the specification included in the ITT. This procurement process is an OJEU open procedure, which is advertised on the University’s electronic tendering portal (Delta eSourcing), contracts finder and EU Publications Office as required within the Public Contract Regulations 2015. The contract is partly funded by a European Regional Development Fund (ERDF) grant award.