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Awarded

Provision of a 200mm Spectroscopic Ellipsometer

Published

Supplier(s)

Quantum Design UK and Ireland Ltd.

Value

258,830 GBP

Description

The SNC (Southampton Nanofabrication Centre) wants to purchase a Spectroscopic Ellipsometer capable of handling 200mm wafers. Spectroscopic Ellipsometery is an essential characterisation technique for the facility and is used daily to rapidly qualify the majority of all lithographic, deposition, and etch processing. Throughput, measurement speed, and sample flexibility are important factors to this procurement. Lot 1: The SNC (Southampton Nanofabrication Centre) wants to purchase a Spectroscopic Ellipsometer capable of handling 200mm wafers. Spectroscopic Ellipsometery is an essential characterisation technique for the facility and is used daily to rapidly qualify the majority of all lithographic, deposition, and etch processing. Throughput, measurement speed, and sample flexibility are important factors to this procurement.

Timeline

Award date

8 months ago

Publish date

8 months ago

Buyer information

University of Southampton

Contact:
Morgan Hughes
Email:
procurement@soton.ac.uk

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