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Awarded contract

Published

Laboratory, optical and precision equipments (excl. glasses)

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Buyer

Technische Universität Dresden, Dezernat Finanzen und Beschaffung, Sachgebiet Zentrale Beschaffung und Anlagenbuchhaltung

Current supplier

Oxford Instruments GmbH

Description

Gegenstand des Vergabeverfahrens ist die Lieferung und betriebsbereite Übergabe von drei unterschiedlichen Plasmaanlagen. 1 Analge für reaktives Ionenätzen (ICP RIE Anlage) 1 Anlage für tiefes Ionenätzen (DRIE Anlage) 1 Anlage zur plasmaunterstützten chemischen Gasphasenabscheidung (PECVD Anlage) einschließlich Lieferung, Installation, Einweisung.

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CPV Codes

38000000 - Laboratory, optical and precision equipments (excl. glasses)
38900000 - Miscellaneous evaluation or testing instruments
38800000 - Industrial process control equipment and remote-control equipment
38700000 - Time registers and the like; parking meters
38600000 - Optical instruments
38500000 - Checking and testing apparatus
38400000 - Instruments for checking physical characteristics

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