The supply, delivery and installation of Two Optical Inspection Microscopes for 200mm wafer Inspection for the Tyndall National Institute, University College Cork

Description

The Process & Product Development laboratories at Tyndall National Institute, UCC, fabricate a wide variety of Semiconductor devices, ranging from traditional Silicon microelectronics and Silicon MEMS to III-V photonic devices. Wish to extend our capability with the purchase of two Optical microscopes to facilitate inspection of 200mm diameter wafers. The two systems offered must be suitable for use in a class 1000 cleanroom. As much of the work is in the area of Semiconductor R&D, we have a requirement that the systems can handle wafer substrates of varying sizes from 100mm, 150mm through to 200mm wafers.