Awarded contract

Published 4 years ago

Lieferung und Inbetriebnahme einer ICPCVD Plasmaanlage

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Buyer

Max-Planck-Institut für Chemische Energiekonversion

Current supplier

Oxford Instruments GmbH Plasma Technology

Description

Lieferung und Inbetriebnahme einer ICPCVD Plasmaanlage mit hoher Plasmauniformität und gleichmäßiger Oberflächenbearbeitung von bis zu 200 mm großen Substraten. Lot 1: Lieferung und Inbetriebnahme einer ICPCVD Plasmaanlage mit hoher Plasmauniformität und gleichmäßiger Oberflächenbearbeitung von bis zu 200 mm großen Substraten.

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Product / service

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Contract structure

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Organisation mentioned

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Supplier requirements

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