Awarded contract
Published
Lieferung und Inbetriebnahme einer ICPCVD Plasmaanlage
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Current supplier
Oxford Instruments GmbH Plasma Technology
Description
Lieferung und Inbetriebnahme einer ICPCVD Plasmaanlage mit hoher Plasmauniformität und gleichmäßiger Oberflächenbearbeitung von bis zu 200 mm großen Substraten. Lot 1: Lieferung und Inbetriebnahme einer ICPCVD Plasmaanlage mit hoher Plasmauniformität und gleichmäßiger Oberflächenbearbeitung von bis zu 200 mm großen Substraten.
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