Awarded contract
Published
UHV-Sputtersystem mit zwei Depositionskammern, Ladeschleuse und UHV-Transferkammer
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Description
UHV-Sputtersystem mit zwei Depositionskammern, Ladeschleuse und UHV-Transferkammer Lot 1: UHV-Sputtersystem mit zwei Depositionskammern, Ladeschleuse und UHV-Transferkammer inkl. Elektronik, Gashandling und Steuerung.
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