Awarded contract
Published
Gallium FIB-SEM dual beam System
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Current supplier
FEI Deutschland GmbH
Description
Lieferung und Installation eines Gallium FIB-SEM dual beam Systems Lot 1: Gegenstand der Ausschreibung ist die Beschaffung von eines Focused Ion Beam (FIB)-Rasterelektronenmikroskop (SEM) dual beam Systems, ausgestattet mit einer Gallium-Ionenquelle, Elektronenrückstreubeugung (EBSD) und EDX in-situ Analysewerkzeugen. Zu den Funktionen gehören unteranderem eine 3-Achsen Manipulation für die in-situ Lamellen-Manipulation (TEM), sowie in-situ Strahl-induzierte Metallkontakte/dielektrische Schichtabscheidung.
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