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Sputtersystem
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Description
Die Universität Regensburg plant in der Fakultät für Physik die Beschaffung eines neuen Sputtersystems. Die Sputteranlage soll dabei das Abscheiden von antiferro- und ferromagnetischen Materialien, sowie Materialien mit hohem Spin-Hall-Winkel (z.B. Pt, Ta, W) und guter magnetischer Kopplungseigenschaft (z.B. Ru, Ir) zweier magnetischer Lagen übernehmen. Es werden mindestens 8 Sputterquellenflansche für 2“-Sputterquellen benötigt. Lot 1: Sputtersystem
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