LA3184C - CFT for the Supply, Delivery, Installation, Commissioning and Calibration of a Laser Confocal Microscope for University College Cork (UCC)

Description

University College Cork request the supply of a Laser Confocal Microscope for use with semiconductor materials in wafer and coupon format. The required system will be used to carry out high precision, quantitative measurements of features on the surface of a wafer following processing where complex layers and 3D structures have been built up. The system will be required to measure lateral and vertical structures with high accuracy. Image stitching and automated measurements will be required and the system must be suited for use with wafer sizes of up to 200mm in diameter as well as small coupons of approximately 5mm x 5mm.