GB-Middlesbrough: SME InnovaTIon Accelerator (TIA), ERDF funded

Description

This is ERDF funded. A.Microfabrication Station UV Lamp: 365nm, Automated loading of wafer and exposure, adjustable power up to 44mW/cm2. Include virgin glass 5inches mask for exposure with plastic mask. Spin Coater: 12000rpm, polypropylene housing, vacuum chuck for wafer, vacuum chuck for fragments. Alignment tool, removable process chamber liner. Plasma Cleaner: Glass plate, high vacuum pump, interconnection tubing and fitting. B.Accessory kit for SU8 mould processing All items necessary to perform photolithography processes with liquid resins, including simple scotch tape, wafer stainless tweezer, silicon wafers, thermometer/hygrometer or macro-pipette. C.Accessory kit for PDMS micro-structured device replication All items necessary needed to perform PDMS micro-structured replication, including plastic petri dish, scalpel, microscope cover slide, blow air gun, syringe for chemical dispensing. D.Installation and Training Installation of the equipment with and options for both remote and on-site training on the global microfabrication process. A fume hood will be provided. E.Overall requirements The equipment set should allow creation of PDMS devices with feature sizes of 2M and have the capability of being easily upgraded and expanded as required. Documentation of microfabrication system should include explanation of correct use of the system and maintenance. The system with a one-year warranty and comply with all relevant university as well as national health and safety requirements. If a range of hardware is available that meet the requirements then indicate how each one meets the requirements.