Provision of Parts for the Construction of a Physical Vapour Deposition System

Description

The University has a requirement for the Provision of Parts for the construction of a Physical Vapour Deposition System. This requirement is split into four (4) Lots. Lot 1 - Provision of 5Kw Pulsed DC Power Supplies Lot 2 - Provision of a High Frequency 6Kw Power Supply for Substrate Bias Lot 3 - Provision of a 1600 litre per second turbomolecular pump Lot 4 - Provision of a dry pump (circa 1000 litres per min) Lot 1: Provision of 5Kw Pulsed DC Power Supplies The Contractor shall supply and deliver Three off, 5 kW Pulsed DC Power Supplies. The Power Supplies are to be configured for Magnetron Sputtering Operation. The Contractor shall provide a five (5) year maintenance and servicing plan, commencing from the date of delivery. Lot 2: Provision of a High Frequency 6Kw Power Supply for Substrate Bias The Contractor shall supply and deliver a One off, high frequency 6kW power supply for substrate bias. Configured for Bias Operation. The Contractor shall provide a five (5) year maintenance and servicing plan, commencing from the date of delivery. Lot 3: Provision of a 1600 litre per second turbomolecular pump The Contractor shall supply and deliver a 1600 litre per second turbomolecular pump. The Contractor shall provide a five (5) year maintenance and servicing plan, commencing from the date of delivery. Lot 4: Provision of a dry pump (circa 1000 litres per min) The Contractor shall supply and deliver a dry pump (circa 1000 litres per min). The Contractor shall provide a five (5) year maintenance and servicing plan, commencing from the date of delivery.